Cantilever-based photoacoustic sensor for terahertz range

Erkki Ikonen, Sucheta Sharma, Mohsen Ahmadi, Jussi Rossi, Markku Vainio, Zhipei Sun, Andreas Steiger

Forskningsoutput: Kapitel i bok/rapport/konferenshandlingKonferensbidragVetenskapligPeer review

Sammanfattning

Advantages of photoacoustic detection with a silicon cantilever microphone are demonstrated in the THz range. In our method, earlier membrane microphone is replaced with robust silicon cantilever microphone, which can tolerate high intensity of the input radiation in contrast to vulnerable membrane. The responsivity of the photoacoustic sensor was confirmed to be constant over almost six orders of magnitude of input power, which is not easy to achieve with any other detector of THz radiation. Another favorable feature of the photoacoustic sensor is its uniform spatial responsivity over areas of several millimeters in size. Finally, we measured nearly constant spectral responsivity of the photoacoustic sensor for the wavelength range of 0.3 µm to 200 µm.

Originalspråkengelska
Titel på värdpublikationTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVI
RedaktörerLaurence P. Sadwick, Tianxin Yang
FörlagWashington SPIE
Utgivningsdatum2023
Artikelnummer124200A
ISBN (elektroniskt)9781510659452
DOI
StatusPublicerad - 2023
MoE-publikationstypA4 Artikel i en konferenspublikation
EvenemangTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications - San Francisco, Förenta Staterna (USA)
Varaktighet: 30 jan. 20231 feb. 2023
Konferensnummer: 16

Publikationsserier

NamnProceedings of SPIE - The International Society for Optical Engineering
Volym12420
ISSN (tryckt)0277-786X
ISSN (elektroniskt)1996-756X

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