Device and method for measuring an optical thickness of a layer

Ivan Vladislavov Kassamakov; Risto Matti Kalevi Montonen; Edward Olof Haeggström; Antti Kontiola; Ari Henrik Salmi

Device and method for measuring an optical thickness of a layer

Ivan Vladislavov Kassamakov, Risto Matti Kalevi Montonen, Edward Olof Haeggström, Antti Kontiola, Ari Henrik Salmi

Avdelningen för fysik

Forskningsoutput: Patent

Originalspråk	engelska
Utgivningsår	2018
Status	Publicerad - 2018
MoE-publikationstyp	Ej behörig

Vetenskapsgrenar

114 Fysik

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@misc{ba825a958c874374afd4fea1e05fed1c,

title = "Device and method for measuring an optical thickness of a layer",

keywords = "114 Physical sciences",

author = "Kassamakov, {Ivan Vladislavov} and Montonen, {Risto Matti Kalevi} and Haeggstr{\"o}m, {Edward Olof} and Antti Kontiola and Salmi, {Ari Henrik}",

year = "2018",

language = "English",

type = "Patent",

note = "WO2018011466A1; : A61B3/10; G01B11/06; G01B9/02",

}