Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer

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Sammanfattning

We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
Originalspråkengelska
Artikelnummer10330 0A
TidskriftProceedings of SPIE, the International Society for Optical Engineering
Volym10330
Antal sidor7
ISSN0277-786X
DOI
StatusPublicerad - 2017
MoE-publikationstypA4 Artikel i en konferenspublikation
EvenemangConference on Modeling Aspects in Optical Metrology - Munich, Tyskland
Varaktighet: 26 jun 201728 jun 2017
Konferensnummer: VI

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