Projekt per år
Sammanfattning
We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
Originalspråk | engelska |
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Artikelnummer | 10330 0A |
Tidskrift | Proceedings of SPIE, the International Society for Optical Engineering |
Volym | 10330 |
Antal sidor | 7 |
ISSN | 0277-786X |
DOI | |
Status | Publicerad - 2017 |
MoE-publikationstyp | A4 Artikel i en konferenspublikation |
Evenemang | Conference on Modeling Aspects in Optical Metrology - Munich, Tyskland Varaktighet: 26 juni 2017 → 28 juni 2017 Konferensnummer: VI |
Vetenskapsgrenar
- 114 Fysik
Projekt
- 1 Slutfört
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ERC Advanced Grant project SAEMPL (No. 320733)
Muinonen, K., Peltoniemi, J., Penttilä, A., Markkanen, J., Zubko, E., Pentikäinen, H., Guirado Rodriguez, D., Gritsevich, M., Kassamakov, I., Harju, J., Pelkonen, V., Väisänen, T., Martikainen, J., Herranen, J., Maconi, G., Helander, P. & Rantakylä, J.
01/04/2013 → 31/03/2018
Projekt: Forskningsprojekt