@article{b4343a452b7f4391a0c82da177a721d5,
title = "Fabrication of GaN-air channels for embedded photonic structures",
keywords = "Electrochemical etching, Gallium nitride, High index contrast, Ion implantation, Optical engineering, Porous GaN, 114 Physical sciences",
author = "Marta Sawicka and Oliwia Golyga and Natalia Fiuczek and Grzegorz Muziol and Anna Feduniewicz-Zmuda and Marcin Siekacz and Henryk Turski and Robert Czernecki and Ewa Grzanka and Igor Prozheev and Filip Tuomisto and Czeslaw Skierbiszewski",
year = "2023",
month = mar,
day = "1",
doi = "10.1016/j.mssp.2022.107234",
language = "English",
volume = "155",
journal = "Materials Science in Semiconductor Processing",
issn = "1369-8001",
publisher = "Elsevier Ltd. ",
}