Fabrication of Silicon Nanostructures with Electric Discharge

Niina Suni, Markus Haapala, Elina Färm, Mikko Ritala, Tapio Kotiaho, Lauri Sainiemi, Sami Franssila, Risto Kostiainen

    Forskningsoutput: Kapitel i bok/rapport/konferenshandlingKonferensbidragVetenskapligPeer review

    Originalspråkengelska
    Titel på gästpublikation13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
    Antal sidor3
    Utgivningsdatum2009
    Sidor254-256
    StatusPublicerad - 2009
    MoE-publikationstypA4 Artikel i en konferenspublikation
    EvenemangInternational Conference on Miniaturized Systems for Chemistry and Life Sciences - Jeju, Sydkorea
    Varaktighet: 1 nov 20095 nov 2009
    Konferensnummer: 13

    Vetenskapsgrenar

    • 116 Kemi
    • 317 Farmaci

    Citera det här

    Suni, N., Haapala, M., Färm, E., Ritala, M., Kotiaho, T., Sainiemi, L., ... Kostiainen, R. (2009). Fabrication of Silicon Nanostructures with Electric Discharge. I 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences (s. 254-256)
    Suni, Niina ; Haapala, Markus ; Färm, Elina ; Ritala, Mikko ; Kotiaho, Tapio ; Sainiemi, Lauri ; Franssila, Sami ; Kostiainen, Risto. / Fabrication of Silicon Nanostructures with Electric Discharge. 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. 2009. s. 254-256
    @inproceedings{4f4c5bee22584d319100fbc11ea3f8ae,
    title = "Fabrication of Silicon Nanostructures with Electric Discharge",
    keywords = "116 Chemical sciences, 317 Pharmacy",
    author = "Niina Suni and Markus Haapala and Elina F{\"a}rm and Mikko Ritala and Tapio Kotiaho and Lauri Sainiemi and Sami Franssila and Risto Kostiainen",
    note = "Volume: Proceeding volume:",
    year = "2009",
    language = "English",
    pages = "254--256",
    booktitle = "13th International Conference on Miniaturized Systems for Chemistry and Life Sciences",

    }

    Suni, N, Haapala, M, Färm, E, Ritala, M, Kotiaho, T, Sainiemi, L, Franssila, S & Kostiainen, R 2009, Fabrication of Silicon Nanostructures with Electric Discharge. i 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. s. 254-256, International Conference on Miniaturized Systems for Chemistry and Life Sciences, Jeju, Sydkorea, 01/11/2009.

    Fabrication of Silicon Nanostructures with Electric Discharge. / Suni, Niina; Haapala, Markus; Färm, Elina; Ritala, Mikko; Kotiaho, Tapio; Sainiemi, Lauri; Franssila, Sami; Kostiainen, Risto.

    13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. 2009. s. 254-256.

    Forskningsoutput: Kapitel i bok/rapport/konferenshandlingKonferensbidragVetenskapligPeer review

    TY - GEN

    T1 - Fabrication of Silicon Nanostructures with Electric Discharge

    AU - Suni, Niina

    AU - Haapala, Markus

    AU - Färm, Elina

    AU - Ritala, Mikko

    AU - Kotiaho, Tapio

    AU - Sainiemi, Lauri

    AU - Franssila, Sami

    AU - Kostiainen, Risto

    N1 - Volume: Proceeding volume:

    PY - 2009

    Y1 - 2009

    KW - 116 Chemical sciences

    KW - 317 Pharmacy

    M3 - Conference contribution

    SP - 254

    EP - 256

    BT - 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences

    ER -

    Suni N, Haapala M, Färm E, Ritala M, Kotiaho T, Sainiemi L et al. Fabrication of Silicon Nanostructures with Electric Discharge. I 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. 2009. s. 254-256