High-quality slot waveguide ring resonator based on atomic layer deposition

A. Autere; L. Karvonen; A. Saynatjoki; M. Roussey; E. Färm; M. Kemell; X. Tu; T. Y. Liow; G. Q. Lo; M. Ritala; M. Leskelä; S. Honkanen; Z. Sun

doi:10.1117/12.2076903

High-quality slot waveguide ring resonator based on atomic layer deposition

A. Autere, L. Karvonen, A. Saynatjoki, M. Roussey, E. Färm, M. Kemell, X. Tu, T. Y. Liow, G. Q. Lo, M. Ritala, M. Leskelä, S. Honkanen, Z. Sun

Forskningsoutput: Kapitel i bok/rapport/konferenshandling › Konferensbidrag › Vetenskaplig

Originalspråk	engelska
Titel på värdpublikation	SILICON PHOTONICS X
Redaktörer	GT Reed, MR Watts
Antal sidor	7
Förlag	SPIE
Utgivningsdatum	2015
Artikelnummer	93671J
ISBN (tryckt)	978-1-62841-457-8
DOI	https://doi.org/10.1117/12.2076903
Status	Publicerad - 2015
MoE-publikationstyp	B3 Ej refererad artikel i konferenshandlingar
Evenemang	Silicon Photonics - San Francisco, Förenta Staterna (USA) Varaktighet: 9 feb. 2015 → 12 feb. 2015 Konferensnummer: X

Publikationsserier

Namn	Proceedings of SPIE
Förlag	SPIE
Volym	9367
ISSN (tryckt)	0277-786X

Vetenskapsgrenar

114 Fysik
116 Kemi

Åtkomst av dokument

10.1117/12.2076903

Citera det här

Autere, A., Karvonen, L., Saynatjoki, A., Roussey, M., Färm, E., Kemell, M., Tu, X., Liow, T. Y., Lo, G. Q., Ritala, M., Leskelä, M., Honkanen, S., & Sun, Z. (2015). High-quality slot waveguide ring resonator based on atomic layer deposition. I GT. Reed, & MR. Watts (Red.), SILICON PHOTONICS X Artikel 93671J (Proceedings of SPIE ; Vol. 9367 ). SPIE. https://doi.org/10.1117/12.2076903

@inproceedings{70205851b4094a1db9aa104c27672982,

title = "High-quality slot waveguide ring resonator based on atomic layer deposition",

keywords = "slot waveguide, ring resonator, atomic layer deposition, SILICON, MODULATOR, 114 Physical sciences, 116 Chemical sciences",

author = "A. Autere and L. Karvonen and A. Saynatjoki and M. Roussey and E. F{\"a}rm and M. Kemell and X. Tu and Liow, {T. Y.} and Lo, {G. Q.} and M. Ritala and M. Leskel{\"a} and S. Honkanen and Z. Sun",

year = "2015",

doi = "10.1117/12.2076903",

language = "English",

isbn = "978-1-62841-457-8",

series = "Proceedings of SPIE ",

publisher = "SPIE",

editor = "GT Reed and MR Watts",

booktitle = "SILICON PHOTONICS X",

address = "United States",

note = "Silicon Photonics ; Conference date: 09-02-2015 Through 12-02-2015",

}

Autere, A, Karvonen, L, Saynatjoki, A, Roussey, M, Färm, E, Kemell, M, Tu, X, Liow, TY, Lo, GQ, Ritala, M , Leskelä, M, Honkanen, S & Sun, Z 2015, High-quality slot waveguide ring resonator based on atomic layer deposition. i GT Reed & MR Watts (red), SILICON PHOTONICS X ., 93671J, Proceedings of SPIE , vol. 9367 , SPIE, Silicon Photonics, San Francisco, Förenta Staterna (USA), 09/02/2015. https://doi.org/10.1117/12.2076903

TY - GEN

T1 - High-quality slot waveguide ring resonator based on atomic layer deposition

AU - Autere, A.

AU - Karvonen, L.

AU - Saynatjoki, A.

AU - Roussey, M.

AU - Färm, E.

AU - Kemell, M.

AU - Tu, X.

AU - Liow, T. Y.

AU - Lo, G. Q.

AU - Ritala, M.

AU - Leskelä, M.

AU - Honkanen, S.

AU - Sun, Z.

N1 - Conference code: X

PY - 2015

Y1 - 2015

KW - slot waveguide

KW - ring resonator

KW - atomic layer deposition

KW - SILICON

KW - MODULATOR

KW - 114 Physical sciences

KW - 116 Chemical sciences

U2 - 10.1117/12.2076903

DO - 10.1117/12.2076903

M3 - Conference contribution

SN - 978-1-62841-457-8

T3 - Proceedings of SPIE

BT - SILICON PHOTONICS X

A2 - Reed, GT

A2 - Watts, MR

PB - SPIE

T2 - Silicon Photonics

Y2 - 9 February 2015 through 12 February 2015

ER -