@inproceedings{3d6cc20ec20a49d0a02f0f2218485e3b,
title = "Impact of rapid thermal annealing of Ti/TiN bilayers on subsequent chemical vapor deposition of tungsten",
author = "A Mouroux and R Palmans and J Keinonen and SL Zhang and K Maex and S Petersson",
note = " Volume: Proceeding volume: ",
year = "1996",
language = "English",
series = "MATERIALS RESEARCH SOCIETY CONFERENCE PROCEEDINGS",
publisher = "MATERIALS RESEARCH SOC",
pages = "365--370",
editor = "KN Tu and JW Mayer and JM Poate and LJ Chen",
booktitle = "Unknown host publication",
}