Infrared Scanning White Light Interferometry Using a Solid State Light Source

Ville Heikkinen; Juha Pekka Aaltonen; Ben Wälchli; Heikki Räikkönen; Ivan Vladislavov Kassamakov; Tania Cholakova; Kestutis Grigoras; Sami Franssila; Roumen Kakanakov; Edward Haeggström

doi:10.1117/12.874966

Infrared Scanning White Light Interferometry Using a Solid State Light Source

Ville Heikkinen, Juha Pekka Aaltonen, Ben Wälchli, Heikki Räikkönen, Ivan Vladislavov Kassamakov, Tania Cholakova, Kestutis Grigoras, Sami Franssila, Roumen Kakanakov, Edward Haeggström

Forskningsoutput: Kapitel i bok/rapport/konferenshandling › Konferensbidrag › Vetenskaplig › Peer review

Sammanfattning

Scanning White Light Interferometry (SWLI) allows surface characterization of MEMS components. With transparent samples SWLI can image multiple stacked layers. However, since silicon is opaque to visible wavelengths, only the top layer can be measured using visible light. We combined multiple infrared light emitting diodes (IR-LEDs) to achieve adjustable IR illumination. This allows simultaneous measurement of top and bottom surface topographies of silicon samples - such as MEMS membranes- using a SWLI equipped with an IR camera. This advances the state of the art of the field of MEMS characterization by allowing looking under membranes of these devices during operation.

Originalspråk	engelska
Titel på värdpublikation	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices
Antal sidor	9
Volym	7928
Utgivningsort	San Francisco
Förlag	SPIE
Utgivningsdatum	25 feb. 2011
Sidor	792809-1 - 792809-9
DOI	https://doi.org/10.1117/12.874966
Status	Publicerad - 25 feb. 2011
MoE-publikationstyp	A4 Artikel i en konferenspublikation
Evenemang	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X - San Francisco, Förenta Staterna (USA) Varaktighet: 24 jan. 2011 → 24 jan. 2011 Konferensnummer: 10

Publikationsserier

Namn	Proceedings of SPIE
Förlag	SPIE
Volym	7928

Vetenskapsgrenar

114 Fysik

Åtkomst av dokument

10.1117/12.874966

http://dx.doi.org/10.1117/12.874966

Citera det här

Heikkinen, V., Aaltonen, J. P., Wälchli, B., Räikkönen, H., Kassamakov, I. V., Cholakova, T., Grigoras, K., Franssila, S., Kakanakov, R., & Haeggström, E. (2011). Infrared Scanning White Light Interferometry Using a Solid State Light Source. I Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices (Vol. 7928, s. 792809-1 - 792809-9). (Proceedings of SPIE; Vol. 7928). SPIE. https://doi.org/10.1117/12.874966

@inproceedings{e9e8df47f2f3432395daefcb083dd136,

title = "Infrared Scanning White Light Interferometry Using a Solid State Light Source",

abstract = "Scanning White Light Interferometry (SWLI) allows surface characterization of MEMS components. With transparent samples SWLI can image multiple stacked layers. However, since silicon is opaque to visible wavelengths, only the top layer can be measured using visible light. We combined multiple infrared light emitting diodes (IR-LEDs) to achieve adjustable IR illumination. This allows simultaneous measurement of top and bottom surface topographies of silicon samples - such as MEMS membranes- using a SWLI equipped with an IR camera. This advances the state of the art of the field of MEMS characterization by allowing looking under membranes of these devices during operation.",

keywords = "114 Physical sciences, Scanning White Light Interferometry, LED, Infrared, MEMS",

author = "Ville Heikkinen and Aaltonen, {Juha Pekka} and Ben W{\"a}lchli and Heikki R{\"a}ikk{\"o}nen and Kassamakov, {Ivan Vladislavov} and Tania Cholakova and Kestutis Grigoras and Sami Franssila and Roumen Kakanakov and Edward Haeggstr{\"o}m",

note = " Proceeding volume: 7928; Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X ; Conference date: 24-01-2011 Through 24-01-2011",

year = "2011",

month = feb,

day = "25",

doi = "10.1117/12.874966",

language = "English",

volume = "7928",

series = "Proceedings of SPIE",

publisher = "SPIE",

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booktitle = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices",

address = "United States",

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Heikkinen, V, Aaltonen, JP, Wälchli, B, Räikkönen, H , Kassamakov, IV, Cholakova, T, Grigoras, K, Franssila, S, Kakanakov, R & Haeggström, E 2011, Infrared Scanning White Light Interferometry Using a Solid State Light Source. i Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices . vol. 7928, Proceedings of SPIE, vol. 7928, SPIE, San Francisco, s. 792809-1 - 792809-9, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X, San Francisco, Förenta Staterna (USA), 24/01/2011. https://doi.org/10.1117/12.874966

Infrared Scanning White Light Interferometry Using a Solid State Light Source. / Heikkinen, Ville; Aaltonen, Juha Pekka; Wälchli, Ben et al.
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices . Vol. 7928 San Francisco: SPIE, 2011. s. 792809-1 - 792809-9 (Proceedings of SPIE; Vol. 7928).

Forskningsoutput: Kapitel i bok/rapport/konferenshandling › Konferensbidrag › Vetenskaplig › Peer review

TY - GEN

T1 - Infrared Scanning White Light Interferometry Using a Solid State Light Source

AU - Heikkinen, Ville

AU - Aaltonen, Juha Pekka

AU - Wälchli, Ben

AU - Räikkönen, Heikki

AU - Kassamakov, Ivan Vladislavov

AU - Cholakova, Tania

AU - Grigoras, Kestutis

AU - Franssila, Sami

AU - Kakanakov, Roumen

AU - Haeggström, Edward

N1 - Conference code: 10

PY - 2011/2/25

Y1 - 2011/2/25

N2 - Scanning White Light Interferometry (SWLI) allows surface characterization of MEMS components. With transparent samples SWLI can image multiple stacked layers. However, since silicon is opaque to visible wavelengths, only the top layer can be measured using visible light. We combined multiple infrared light emitting diodes (IR-LEDs) to achieve adjustable IR illumination. This allows simultaneous measurement of top and bottom surface topographies of silicon samples - such as MEMS membranes- using a SWLI equipped with an IR camera. This advances the state of the art of the field of MEMS characterization by allowing looking under membranes of these devices during operation.

AB - Scanning White Light Interferometry (SWLI) allows surface characterization of MEMS components. With transparent samples SWLI can image multiple stacked layers. However, since silicon is opaque to visible wavelengths, only the top layer can be measured using visible light. We combined multiple infrared light emitting diodes (IR-LEDs) to achieve adjustable IR illumination. This allows simultaneous measurement of top and bottom surface topographies of silicon samples - such as MEMS membranes- using a SWLI equipped with an IR camera. This advances the state of the art of the field of MEMS characterization by allowing looking under membranes of these devices during operation.

KW - 114 Physical sciences

KW - Scanning White Light Interferometry

KW - LED

KW - Infrared

KW - MEMS

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T3 - Proceedings of SPIE

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BT - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices

PB - SPIE

CY - San Francisco

T2 - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X

Y2 - 24 January 2011 through 24 January 2011

ER -