@article{64a74cb22a1e4247ad7db6e0379720bc,
title = "Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition",
keywords = "HIGH-ASPECT-RATIO, X-RAY OPTICS, RUTHENIUM FILMS, OXYGEN EXPOSURE, STEP-COVERAGE, NOBLE-METALS, RU FILMS, TEMPERATURE, OZONE, SIMULATION, 116 Chemical sciences, 114 Physical sciences",
author = "Miika Mattinen and Jani H{\"a}m{\"a}l{\"a}inen and Feng Gao and Pasi Jalkanen and Kenichiro Mizohata and Jyrki R{\"a}is{\"a}nen and Puurunen, \{Riikka L.\} and Mikko Ritala and Markku Leskel{\"a}",
year = "2016",
month = oct,
day = "18",
doi = "10.1021/acs.langmuir.6b03007",
language = "English",
volume = "32",
pages = "10559--10569",
journal = "Langmuir",
issn = "0743-7463",
publisher = "American Chemical Society",
number = "41",
}