@article{f32ffc32d78e4f09a84efb11d86bf43c,
title = "On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films",
author = "Dhayalan, \{Sathish Kumar\} and Jiri Kujala and Jonatan Slotte and Geoffrey Pourtois and Eddy Simoen and Erik Rosseel and Andriy Hikavyy and Yosuke Shimura and Serena Iacovo and Andre Stesmans and Roger Loo and Wilfried Vandervorst",
year = "2016",
month = feb,
day = "22",
doi = "10.1063/1.4942605",
language = "English",
volume = "108",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "8",
}