@article{003df98dbce44519a7398f9453410919,
title = "Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films",
keywords = "PHYSICAL-PROPERTIES, BETA-DIKETONATE, EPITAXY, GROWTH, BATTERIES, TANTALATE, DECOMPOSITION, PRECURSORS, LI4TI5O12, NIOBATE, 116 Chemical sciences, 114 Physical sciences",
author = "Elisa Atosuo and Miia M{\"a}ntym{\"a}ki and Kenichiro Mizohata and Heikkil{\"a}, {Mikko J.} and Jyrki R{\"a}is{\"a}nen and Mikko Ritala and Markku Leskel{\"a}",
year = "2017",
month = feb,
day = "14",
doi = "10.1021/acs.chemmater.6b03586",
language = "English",
volume = "29",
pages = "998--1005",
journal = "Chemistry of Materials",
issn = "0897-4756",
publisher = "American Chemical Society",
number = "3",
}