Simulation of redistributive and erosive effects in a-Si under Ar+ irradiation

A. Lopez-Cazalilla, A. Ilinov, L. Bukonte, K. Nordlund, F. Djurabekova, S. Norris, J.C. Perkinson

Forskningsoutput: TidskriftsbidragArtikelVetenskapligPeer review

Originalspråkengelska
TidskriftNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volym414
Sidor (från-till)133-140
Antal sidor8
ISSN0168-583X
DOI
StatusPublicerad - 1 jan 2018
MoE-publikationstypA1 Tidskriftsartikel-refererad

Vetenskapsgrenar

  • 114 Fysik

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title = "Simulation of redistributive and erosive effects in a-Si under Ar+ irradiation",
keywords = "Ripple, Wavelength, Redistribution, Erosion, MD, BCA, Crater function, MOLECULAR-DYNAMICS, APPROXIMATION, SILICON, ION-BOMBARDMENT, RANGE, 114 Physical sciences",
author = "A. Lopez-Cazalilla and A. Ilinov and L. Bukonte and K. Nordlund and F. Djurabekova and S. Norris and J.C. Perkinson",
year = "2018",
month = "1",
day = "1",
doi = "10.1016/j.nimb.2017.11.019",
language = "English",
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journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
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Simulation of redistributive and erosive effects in a-Si under Ar+ irradiation. / Lopez-Cazalilla, A.; Ilinov, A.; Bukonte, L.; Nordlund, K.; Djurabekova, F.; Norris, S.; Perkinson, J.C.

I: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 414, 01.01.2018, s. 133-140.

Forskningsoutput: TidskriftsbidragArtikelVetenskapligPeer review

TY - JOUR

T1 - Simulation of redistributive and erosive effects in a-Si under Ar+ irradiation

AU - Lopez-Cazalilla, A.

AU - Ilinov, A.

AU - Bukonte, L.

AU - Nordlund, K.

AU - Djurabekova, F.

AU - Norris, S.

AU - Perkinson, J.C.

PY - 2018/1/1

Y1 - 2018/1/1

KW - Ripple

KW - Wavelength

KW - Redistribution

KW - Erosion

KW - MD

KW - BCA

KW - Crater function

KW - MOLECULAR-DYNAMICS

KW - APPROXIMATION

KW - SILICON

KW - ION-BOMBARDMENT

KW - RANGE

KW - 114 Physical sciences

U2 - 10.1016/j.nimb.2017.11.019

DO - 10.1016/j.nimb.2017.11.019

M3 - Article

VL - 414

SP - 133

EP - 140

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -