Spatial distribution of particles sputtered from single crystals by gas cluster ions

A.V. Nazarov , V.S. Chernysh , Kai Nordlund, Flyura Djurabekova, Junlei Zhao

Forskningsoutput: TidskriftsbidragKonferensartikelVetenskapligPeer review

Sammanfattning

The results of molecular dynamics simulations of the bombardment of the Cu (100) and Mo (100) single-crystals by 10 keV Ar cluster ions of different sizes are presented in this paper. Spatial distributions of sputtered material were calculated. The anisotropy of the angular distributions of sputtered atoms was revealed. It was found that the character of the anisotropy is different for Cu and Mo targets. The reasons leading to this anisotropy are discussed according to the dependences of the angular distributions on the cluster size and on the target material.
Originalspråkengelska
TidskriftNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volym406
Sidor (från-till)518-522
Antal sidor5
ISSN0168-583X
DOI
StatusPublicerad - 22 jan 2017
MoE-publikationstypA4 Artikel i en konferenspublikation
EvenemangInternational Conference on Atomic Collisions in Solids - Lanzhou, Kina
Varaktighet: 24 jul 201629 jul 2016
Konferensnummer: 27

Vetenskapsgrenar

  • 114 Fysik

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title = "Spatial distribution of particles sputtered from single crystals by gas cluster ions",
abstract = "The results of molecular dynamics simulations of the bombardment of the Cu (100) and Mo (100) single-crystals by 10 keV Ar cluster ions of different sizes are presented in this paper. Spatial distributions of sputtered material were calculated. The anisotropy of the angular distributions of sputtered atoms was revealed. It was found that the character of the anisotropy is different for Cu and Mo targets. The reasons leading to this anisotropy are discussed according to the dependences of the angular distributions on the cluster size and on the target material.",
keywords = "114 Physical sciences",
author = "A.V. Nazarov and V.S. Chernysh and Kai Nordlund and Flyura Djurabekova and Junlei Zhao",
note = "Volume: 406 Host publication title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Proceeding volume:",
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Spatial distribution of particles sputtered from single crystals by gas cluster ions. / Nazarov , A.V. ; Chernysh , V.S. ; Nordlund, Kai; Djurabekova, Flyura; Zhao, Junlei.

I: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 406, 22.01.2017, s. 518-522.

Forskningsoutput: TidskriftsbidragKonferensartikelVetenskapligPeer review

TY - JOUR

T1 - Spatial distribution of particles sputtered from single crystals by gas cluster ions

AU - Nazarov , A.V.

AU - Chernysh , V.S.

AU - Nordlund, Kai

AU - Djurabekova, Flyura

AU - Zhao, Junlei

N1 - Volume: 406 Host publication title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Proceeding volume:

PY - 2017/1/22

Y1 - 2017/1/22

N2 - The results of molecular dynamics simulations of the bombardment of the Cu (100) and Mo (100) single-crystals by 10 keV Ar cluster ions of different sizes are presented in this paper. Spatial distributions of sputtered material were calculated. The anisotropy of the angular distributions of sputtered atoms was revealed. It was found that the character of the anisotropy is different for Cu and Mo targets. The reasons leading to this anisotropy are discussed according to the dependences of the angular distributions on the cluster size and on the target material.

AB - The results of molecular dynamics simulations of the bombardment of the Cu (100) and Mo (100) single-crystals by 10 keV Ar cluster ions of different sizes are presented in this paper. Spatial distributions of sputtered material were calculated. The anisotropy of the angular distributions of sputtered atoms was revealed. It was found that the character of the anisotropy is different for Cu and Mo targets. The reasons leading to this anisotropy are discussed according to the dependences of the angular distributions on the cluster size and on the target material.

KW - 114 Physical sciences

U2 - 10.1016/j.nimb.2017.01.014

DO - 10.1016/j.nimb.2017.01.014

M3 - Conference article

VL - 406

SP - 518

EP - 522

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -