Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for C-12, O-16, Cl-35, Br-79 and I-127 ions

K. Mizohata; J. Räisänen; J. Keinonen; E. Härkönen; J. Palmans; M. Ritala

doi:10.1016/j.nimb.2013.02.010

Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for C-12, O-16, Cl-35, Br-79 and I-127 ions

K. Mizohata, J. Räisänen, J. Keinonen, E. Härkönen, J. Palmans, M. Ritala

Forskningsoutput: Tidskriftsbidrag › Artikel › Vetenskaplig › Peer review

Originalspråk	engelska
Tidskrift	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volym	300
Sidor (från-till)	1-5
Antal sidor	5
ISSN	0168-583X
DOI	https://doi.org/10.1016/j.nimb.2013.02.010
Status	Publicerad - 1 apr. 2013
MoE-publikationstyp	A1 Tidskriftsartikel-refererad

Vetenskapsgrenar

116 Kemi
114 Fysik

Åtkomst av dokument

10.1016/j.nimb.2013.02.010

Citera det här

Mizohata, K., Räisänen, J., Keinonen, J., Härkönen, E., Palmans, J., & Ritala, M. (2013). Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for C-12, O-16, Cl-35, Br-79 and I-127 ions. Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 300, 1-5. https://doi.org/10.1016/j.nimb.2013.02.010

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title = "Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for C-12, O-16, Cl-35, Br-79 and I-127 ions",

keywords = "Stopping cross section, Al2O3, Ta2O5, Si3N4, Heavy-ions, C-12, O-16, Cl-39, Br-79, I-127, ALD, TOF-ERDA, ENERGY-RANGE, HEAVY-IONS, PRECURSOR, FORCES, 116 Chemical sciences, 114 Physical sciences",

author = "K. Mizohata and J. R{\"a}is{\"a}nen and J. Keinonen and E. H{\"a}rk{\"o}nen and J. Palmans and M. Ritala",

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doi = "10.1016/j.nimb.2013.02.010",

language = "English",

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journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

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Mizohata, K , Räisänen, J , Keinonen, J, Härkönen, E, Palmans, J & Ritala, M 2013, 'Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for C-12, O-16, Cl-35, Br-79 and I-127 ions', Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, vol. 300, s. 1-5. https://doi.org/10.1016/j.nimb.2013.02.010

Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for C-12, O-16, Cl-35, Br-79 and I-127 ions. / Mizohata, K.; Räisänen, J.; Keinonen, J. et al.

I: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 300, 01.04.2013, s. 1-5.

Forskningsoutput: Tidskriftsbidrag › Artikel › Vetenskaplig › Peer review

TY - JOUR

T1 - Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for C-12, O-16, Cl-35, Br-79 and I-127 ions

AU - Mizohata, K.

AU - Räisänen, J.

AU - Keinonen, J.

AU - Härkönen, E.

AU - Palmans, J.

AU - Ritala, M.

PY - 2013/4/1

Y1 - 2013/4/1

KW - Stopping cross section

KW - Al2O3

KW - Ta2O5

KW - Si3N4

KW - Heavy-ions

KW - C-12

KW - O-16

KW - Cl-39

KW - Br-79

KW - I-127

KW - ALD

KW - TOF-ERDA

KW - ENERGY-RANGE

KW - HEAVY-IONS

KW - PRECURSOR

KW - FORCES

KW - 116 Chemical sciences

KW - 114 Physical sciences

U2 - 10.1016/j.nimb.2013.02.010

DO - 10.1016/j.nimb.2013.02.010

M3 - Article

VL - 300

SP - 1

EP - 5

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -