Study of Atomic Layer Deposited Gadolinium Oxide Thin Films on Silicon

Salvador Dueñas; Helena Castán; Héctor Garcia; Alfonso Gómez; Luis Bailón; Kaupo Kukli; Timo Hatanpää; Jun Lu; Mikko Ritala; Markku Leskelä

Study of Atomic Layer Deposited Gadolinium Oxide Thin Films on Silicon

Salvador Dueñas
, Helena Castán
, Héctor Garcia
, Alfonso Gómez
, Luis Bailón
, Kaupo Kukli
, Timo Hatanpää
, Jun Lu
, Mikko Ritala
, Markku Leskelä

Forskningsoutput: Tidskriftsbidrag › Konferensartikel › Vetenskaplig › Peer review

Originalspråk	engelska
Tidskrift	Materials Research Society Symposia Proceedings
Volym	996
Sidor (från-till)	133-138
Antal sidor	6
ISSN	0272-9172
Status	Publicerad - 2007
MoE-publikationstyp	A4 Artikel i en konferenspublikation
Evenemang	2007 MRS Spring Meeting - San Francisco, Förenta Staterna (USA) Varaktighet: 9 apr. 2007 → 13 apr. 2007

Vetenskapsgrenar

116 Kemi

Citera det här

@article{15afea816c4247d08c42ac317192bf46,

title = "Study of Atomic Layer Deposited Gadolinium Oxide Thin Films on Silicon",

keywords = "116 Chemical sciences",

author = "Salvador Due{\~n}as and Helena Cast{\'a}n and H{\'e}ctor Garcia and Alfonso G{\'o}mez and Luis Bail{\'o}n and Kaupo Kukli and Timo Hatanp{\"a}{\"a} and Jun Lu and Mikko Ritala and Markku Leskel{\"a}",

note = " Volume: 996 Host publication title: Materials Research Society Symposium Proceedings ; 2007 MRS Spring Meeting ; Conference date: 09-04-2007 Through 13-04-2007",

year = "2007",

language = "English",

volume = "996",

pages = "133--138",

journal = "Materials Research Society Symposia Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

}

TY - JOUR

T1 - Study of Atomic Layer Deposited Gadolinium Oxide Thin Films on Silicon

AU - Dueñas, Salvador

AU - Castán, Helena

AU - Garcia, Héctor

AU - Gómez , Alfonso

AU - Bailón, Luis

AU - Kukli, Kaupo

AU - Hatanpää, Timo

AU - Lu, Jun

AU - Ritala, Mikko

AU - Leskelä, Markku

N1 - Volume: 996 Host publication title: Materials Research Society Symposium Proceedings

PY - 2007

Y1 - 2007

KW - 116 Chemical sciences

M3 - Conference article

SN - 0272-9172

VL - 996

SP - 133

EP - 138

JO - Materials Research Society Symposia Proceedings

JF - Materials Research Society Symposia Proceedings

T2 - 2007 MRS Spring Meeting

Y2 - 9 April 2007 through 13 April 2007

ER -